Easy one-point thickness gauge for 30–200 mm semiconducting and metallic materials.
The MX301-AC is a robust and stable instrument for quick and simple manual thickness gauge. Made for a large variety of silicon and solar wafers and pieces of semiconducting or metallic materials. Fully self-calibrating without the need for gauge blocks nor reference wafers. Connected to a PC, which allows collecting data of multiple measurements, calculating flatness (TTV), mean value or standard deviation of single wafers or of complete wafer lots.
| Wafer Diameter | up to 200 mm |
| Thickness accurancy | ±0.5 µm |
| Resolution | 10 nm |
| Thickness range | default 200–1000 µm |
| Software | MX-NT |
| Dynamic range | 800 µm |
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