MX 204-8-49-q
Automatable geometry gauge for 125–156mm solar wafers.
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MX 204-8-73-q
Automatable geometry gauge for 125–156mm solar wafers.
The MX204-8-73-q works as manually loaded stand-alone tool as well as fully integrated in automated robot systems. With its 73 sensor pairs it controls thickness, bow and warp in high resolution. Different wafer sizes can be used without changeover thanks to the upstream centering station. Comes with our powerful MX-NT operating software.
Measurement types
Features
| Wafer Diameter | 182 mm, 210 mm |
| Thickness accurancy | ±0.5 µm |
| Resolution | 75nm |
| Thickness range | 200–600 µm |
| Automatic | yes |
| Software | MX-NT |
| Warp characteristics | Sori |
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