MX 203-6-33
Fast contactless geometry gauge for 100–150 mm silicon wafers.
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MX 203-8-37
Fast contactless geometry gauge for 150 mm and 200 mm silicon wafers.
High throughput: the MX203-8-37 gauges with its 37 sensor pairs every wafer within max. 8 seconds. It controls thickness, bow and warp. Wafer stress evaluation is optionally available. Flexible wafer size adjustment by various centering-frames. Comes with our powerful MX-NT operating software.
Measurement types
Features
| Wafer Diameter | 150 mm, 200 mm |
| Thickness accurancy | ±0.5 µm |
| Resolution | 50 nm |
| Thickness range | 400–1000 µm |
| Automatic | no |
| Software | MX-NT |
| Warp characteristics | Gravity-corrected |
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