Fast contactless resistivity gauge for semi-insulating wafers up to 200 mm.
The MX601 gauges resistivity of wafers made of semi-insulating materials like Gallium Arsenide or Silicon Carbide. Fast handling without wafer preparation and excellent repeatability with best avoidance of piezo-electric effects. MX601's serial interface allows data evaluation and statistics, as well as access to calibration constants and output types.
| Wafer Diameter | up to 200 mm |
| Thickness range | 350–650 µm |
| Software | EHMaster |
| Sensor area Ø | 10 mm |
| Measuring time | max. 4 sec. |
| Reproducibility | ± 1% |
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