Easy one-point thickness gauge for 30–200 mm non-conductive wafers.
The MX301-Q is a robust and stable instrument for quick and simple manual thickness gauge. Made for a large variety of wafers consisting of insulating materials like quartz, sapphire or glass. Fully self-calibrating without the need for gauge blocks nor reference wafers. Connected to a PC, which allows collecting data of multiple measurements, calculating flatness (TTV), mean value or standard deviation of single wafers or of complete wafer lots.
| Wafer Diameter | up to 200 mm |
| Thickness accurancy | ±0.5 µm |
| Resolution | 0.1 µm |
| Thickness range | default 450–750 µm |
| Software | MX-NT |
| Switchable to measure high-res material | yes |
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