MX 204-8-49-q
Automatable geometry gauge for 125–156mm solar wafers.
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MX 604-ST
Combined thickness and resistivity gauge for up to 156 mm solar wafers
The MX604-ST is designed to characterize solar wafers. Fits square wafers up to 156mm and round wafers from 2" to 200mm. It combines sensors for measuring thickness and resistivity simultaneously. Fully self-calibrating, thus temperature and humidity changes are negligible. Integrated alphanumeric display. Workes as stand-alone or connected to a PC via serial interface, which allows collecting data of multiple measurements, mean value or standard deviation of single wafers or of complete wafer lots.
Measurement types
Features
| Wafer Diameter | 2" to 8" |
| Thickness accurancy | ± 1 µm |
| Thickness range | 60–300 µm or 250–750 µm |
| Software | EHMaster |
| Measuring time | 0.3 s |
| Sensor diameter | 20 mm |
| Active area | 8 mm Ø |
| Distance from edge | 10 mm |
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