MX 204-8-37
Automatable geometry gauge for 150 mm and 200 mm silicon wafers.
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MX 204-48-37
Automatable geometry gauge for 100, 150 and 200 mm silicon wafers.
The MX204-48-37 works as manually loaded stand-alone tool as well as fully integrated in automated robot systems. With its 37 sensor pairs it controls thickness, bow and warp in high resolution. Wafer stress evaluation is optionally available. Different wafer sizes can be used without changeover thanks to the upstream centering station. Comes with our powerful MX-NT operating software.
Measurement types
Features
| Wafer Diameter | 100 mm, 150 mm, 200 mm |
| Thickness accurancy | ±0.5 µm |
| Resolution | 75nm |
| Thickness range | 400–900 µm |
| Automatic | yes |
| Software | MX-NT |
| Warp characteristics | Gravity-corrected |
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