Fast contactless geometry gauge for 2–4" non-conductive and semi-insulating wafers.
High throughput: the MX203-4-37-Q gauges with its 37 sensor pairs every wafer within max. 10 seconds. It controls thickness and flatness. Flexible wafer size adjustment by various centering-frames. Suitable for wafers made of non-conductive substrates (Quartz, Sapphire, Lithium Niobate, Lithium Tantalate) and semi-insulating materials like Gallium Arsenide or Silicon Carbide. Comes with our powerful MX-NT operating software.
| Wafer Diameter | 50 mm, 75 mm, 100 mm |
| Thickness accurancy | ±1 µm |
| Resolution | 0.1 µm |
| Thickness range | 300–800 µm |
| Software | MX-NT |
| Non-conductive substrates | yes |
| Semi-insulation materials | above 10⁷ Ohm*cm |
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