MX 204-8-49-q
Automatable geometry gauge for 125–156mm solar wafers.
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MX 203-6-41-q
Fast contactless geometry gauge for 100–156mm solar wafers.
High throughput: the MX203-6-41-q gauges with its 41 sensor pairs every wafer within max. 8 seconds. It controls thickness, bow and warp. Flexible wafer size adjustment by various centering-frames. Comes with our powerful MX-NT operating software.
Measurement types
Features
| Wafer Diameter | 100 mm, 125 mm, 156 mm |
| Thickness accurancy | ±0.5 µm |
| Resolution | 50 nm |
| Thickness range | 160–700 µm |
| Automatic | no |
| Software | MX-NT |
| Warp characteristics | Sori |
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