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Minimum-, Maximum Thickness (MinThk, MaxThk) and Total thickness variation (TTV) = (GBIR)
In an MX 203-8-37, e.g., a six inch wafer is measured at 21, a eight inch wafer at 37
sensor positions. The software computes the two thickness extrema, TTV (Total
Thickness Variation) is the difference between them.
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\(\begin{array}{lll}\text { MinThk } & = & \text { Minimum local thickness value } \\ \text { MaxThk } & = & \text { Maximum local thickness value } \\ \text { TTV } & = & \text { Total thickness variation }\end{array}\)
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