MX 10 - HIGH RESOLUTION
silicon wafer measurement

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The MX 10 series measures thickness and flatness (TTV) on silicon wafers fast and with high accurancy. It can be adapted to different thickness ranges within seconds.

Measurement types for the MX 10 Series:

ThicknessFlatness (TTV)

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MX10 Series

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Wafer Size

Characteristics

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MX 1012

High-resolution thickness and flatness (TTV) gauge for 200–300mm silicon wafers.

MX 102-6

High-resolution thickness and flatness (TTV) gauge for 100–150mm silicon wafers.

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We are able to customize our products to a wide range of technical specifications. Which are yours?

MX 10 - HIGH RESOLUTION silicon wafer measurement

MX 1012

MX 102-6

No Match? No Problem!

MX 10 - HIGH RESOLUTION
silicon wafer measurement