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MX 20 - MULTIFUNCTIONAL
contactless wafer geometry gauge

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The MX 20 series is best suited for incoming inspection, qualification of processes and process control for a large variation of silicon,  solar and other wafers. Partially integrable into automated processes.

Measurement types for the MX 20 Series:

ThicknessFlatness (TTV)Bow & Warp/SoriFilm stress
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Home > Manual Tools > MX20 Series

MX20 Series
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Wafer Size
Characteristics
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MX 2012-H

fast chip production geometry gauge for 300mm silicon wafers.

MX 203-4-21

Fast contactless geometry gauge for 2–4" silicon wafers.

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